Apparatus and method for manufacturing display device

ABSTRACT

An apparatus for manufacturing a display device and a method for manufacturing a display device are provided. According to an exemplary embodiment of the present disclosure, an apparatus for manufacturing a display device includes: a pressing pad including a body portion and a vision hole penetrating the body portion; a vision camera above the vision hole; and a suction picker near the pressing pad.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.16/057,536, filed on Aug. 7, 2018, which claims priority to and thebenefit of Korean Patent Application No. 10-2017-0120467, filed on Sep.19, 2017 in the Korean Intellectual Property Office, the entiredisclosure of each of which is incorporated herein by reference.

BACKGROUND 1. Field

Aspects of embodiments of the present disclosure relate to an apparatusand method for manufacturing a display device.

2. Description of the Related Art

The importance of display devices has steadily grown with recentdevelopments in multimedia technology. As a result, a variety of displaydevices, such as a liquid crystal display (LCD) device, an organiclight-emitting display device, and the like, have been developed andwidely used.

In order to fabricate a display device, a plurality of processes may beperformed. Some of the plurality of processes may be performed in thesame place or in different places. In a case in which several processesare performed in different places, elements and parts subjected to theprocesses need to be transferred from one place to another place.

In order to transfer elements and parts, various transportation meansare needed. Accordingly, the stability and the speed of thetransportation means need to be ensured.

SUMMARY

According to an aspect of one or more exemplary embodiments of thepresent disclosure, an apparatus for manufacturing a display device iscapable of reducing a processing time.

According to another aspect of one or more exemplary embodiments of thepresent disclosure, a method of manufacturing a display device iscapable of reducing a processing time.

However, aspects and features of exemplary embodiments of the presentdisclosure are not restricted to those set forth herein. The above andother aspects of exemplary embodiments of the present disclosure willbecome more apparent to one of ordinary skill in the art to which thepresent disclosure pertains by referencing the further detaileddescription of some exemplary embodiments of the present disclosureprovided below.

According to one or more exemplary embodiments of the presentdisclosure, an apparatus for manufacturing a display device includes: apressing pad including a body portion and a vision hole penetrating thebody portion; a vision camera above the vision hole; and a suctionpicker near the pressing pad.

The pressing pad may further include a pressing portion below the bodyportion, and the vision hole may penetrate the body portion and thepressing portion.

The pressing portion may be formed of an elastic material.

The body portion may be frame-shaped in a plan view.

The body portion may be ring-shaped in a plan view.

The apparatus may further include a stage to support a plurality of unitsubstrates.

At least one alignment mark may be formed on each of the unitsubstrates, and the vision camera may be configured to recognize the atleast one alignment mark through the vision hole.

The pressing pad may be movable downward in a z-axis direction to presseach of the unit substrates.

The pressing pad and the suction picker may be movable downward in thez-axis direction to be concurrently placed in contact with each of theunit substrates.

A distance from a top surface of the stage to the vision camera may bedefined as a first height, a distance from the top surface of the stageto the pressing pad may be defined as a second height, and a valueobtained by dividing the second height by the first height may be 0.4 to0.5.

The vision camera and the vision hole may be aligned in a z-axisdirection.

The apparatus may further include a connecting portion connecting thepressing pad and the vision camera.

A bottom of the pressing pad and a bottom of the suction picker may beon a same plane.

A planar area recognized by the vision camera may be defined as a visionarea, a planar area occupied by the vision hole may be defined as apenetration area, and a value obtained by dividing the area of thepenetration area by the area of the vision area may be 0.8 or greater.

A center of the vision area and a center of the penetration area may beon a same line parallel to a z-axis direction.

The vision camera, the pressing pad, and the suction picker may beconnected to one another and may be movable as one integral body.

According to another exemplary embodiment of the present disclosure, amethod of manufacturing a display device includes: cutting a mothersubstrate into a plurality of unit substrates; and lifting each of theunit substrates using a pickup assembly, and the pickup assemblyincludes a pressing pad including a body portion and a vision holepenetrating the body portion, and a vision camera above the vision hole,and the lifting each of the unit substrates comprises pressing each ofthe unit substrates with the pressing pad.

The lifting each of the unit substrates may further include allowing thevision camera to identify an alignment mark, formed on each of the unitsubstrates, through the vision hole.

The pickup assembly may further include a suction picker near thepressing pad, and if the vision camera recognizes the alignment mark,formed on each of the unit substrates, through the vision hole, thesuction picker may fix the corresponding unit substrate in a vacuumsuction manner.

Each of the unit substrates may include a base substrate and at leastone protective film attached on the base substrate, and the method mayfurther include peeling off the at least one protective film.

According to the aforementioned and other exemplary embodiments of thepresent disclosure, a processing time can be reduced by lowering anerror rate of a pickup assembly.

Other features and exemplary embodiments may be apparent to thoseskilled in the art from the following description, the drawings, and theclaims.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other exemplary embodiments and features of the presentdisclosure will become more apparent by describing in further detailsome exemplary embodiments thereof with reference to the attacheddrawings, in which:

FIG. 1 is a perspective view of an apparatus for manufacturing a displaydevice according to an exemplary embodiment of the present disclosure;

FIG. 2 is a side view of the apparatus according to the exemplaryembodiment of FIG. 1 ;

FIG. 3 is a cross-sectional view of a target object of the apparatusaccording to the exemplary embodiment of FIG. 1 ;

FIG. 4 is a partial plan view of the apparatus according to theexemplary embodiment of FIG. 1 ;

FIG. 5 is a side view of the apparatus according to the exemplaryembodiment of FIG. 1 ;

FIG. 6 is a partial plan view of an apparatus for manufacturing adisplay device according to another exemplary embodiment of the presentdisclosure;

FIG. 7 is a block diagram illustrating a method of manufacturing adisplay device according to an exemplary embodiment of the presentdisclosure;

FIG. 8 is a plan view illustrating a cutting step of the methodaccording to the exemplary embodiment of FIG. 7 ;

FIG. 9 is a plan view illustrating the cutting step of the methodaccording to the exemplary embodiment of FIG. 7 ; and

FIG. 10 is a plan view illustrating a pickup step of the methodaccording to the exemplary embodiment of FIG. 7 .

DETAILED DESCRIPTION

Aspects and features of the present invention and methods for achievingthe aspects and features will be apparent by referring to some exemplaryembodiments to be described in further detail with reference to theaccompanying drawings. However, the present invention is not limited tothe exemplary embodiments disclosed hereinafter, but can be implementedin any of diverse forms. The matter defined in the description, such asthe detailed construction and elements, are provided to assist those ofordinary skill in the art in a comprehensive understanding of theinvention, and the present invention is defined within the scope of theappended claims.

Where an element is described as being related to another element, suchas being “on” another element or “located on” a different layer or alayer, this includes both a case in which an element is located directlyon another element or a layer and a case in which an element is locatedon another element via another layer or still another element. Incontrast, where an element is described as being related to anotherelement, such as being “directly on” another element or “locateddirectly on” a different layer or a layer, this indicates a case inwhich an element is located on another element or a layer with nointervening element or layer therebetween. Throughout the description ofthe present invention, the same drawing reference numerals are used forthe same elements across various figures.

Although the terms “first,” “second,” and so forth may be used todescribe diverse constituent elements, such constituent elements are notlimited by the terms. The terms are used to discriminate a constituentelement from other constituent elements. Accordingly, in the followingdescription, a “first” constituent element may be a “second” constituentelement.

The terminology used herein is for the purpose of describing particularembodiments and is not intended to be limiting. As used herein, thesingular forms “a,” “an,” and “the” are intended to include the pluralforms, including “at least one,” unless the content clearly indicatesotherwise. “At least one” is not to be construed as limiting “a” or“an.” “Or” means “and/or.” As used herein, the term “and/or” includesany and all combinations of one or more of the associated listed items.It is to be further understood that the terms “comprises” and/or“comprising,” or “includes” and/or “including” when used in thisspecification, specify the presence of stated features, regions,integers, steps, operations, elements, and/or components, but do notpreclude the presence or addition of one or more other features,regions, integers, steps, operations, elements, components, and/orgroups thereof.

Furthermore, relative terms, such as “lower” or “bottom” and “upper” or“top,” may be used herein to describe one element's relationship toanother element as illustrated in the figures. It is to be understoodthat relative terms are intended to encompass different orientations ofthe device in addition to the orientation depicted in the figures. Forexample, if the device in one of the figures is turned over, elementsdescribed as being on the “lower” side of other elements would then beoriented on “upper” sides of the other elements. The exemplary term“lower” can, therefore, encompass both an orientation of lower andupper, depending on the particular orientation of the figure. Similarly,if the device in one of the figures is turned over, elements describedas “below” or “beneath” other elements would then be oriented “above”the other elements. The exemplary terms “below” or “beneath” can,therefore, encompass both an orientation of above and below.

“About” or “approximately” as used herein is inclusive of the statedvalue and means within an acceptable range of deviation for theparticular value as determined by one of ordinary skill in the art,considering the measurement in question and the error associated withmeasurement of the particular quantity (e.g., the limitations of themeasurement system). For example, “about” can mean within one or morestandard deviations, or within ±30%, 20%, 10%, or 5% of the statedvalue.

Unless otherwise defined, all terms (including technical and scientificterms) used herein have the same meaning as commonly understood by oneof ordinary skill in the art to which this disclosure belongs. It is tobe further understood that terms, such as those defined in commonly useddictionaries, should be interpreted as having a meaning that isconsistent with their meaning in the context of the relevant art and thepresent disclosure, and are not to be interpreted in an idealized oroverly formal sense unless expressly so defined herein.

Exemplary embodiments may be described herein with reference tocross-sectional illustrations that are schematic illustrations ofidealized embodiments. As such, variations from the shapes of theillustrations as a result, for example, of manufacturing techniquesand/or tolerances, may be expected. Thus, embodiments described hereinshould not be construed as limited to the particular shapes of regionsas illustrated herein, but are to include deviations in shapes thatresult, for example, from manufacturing. For example, a regionillustrated or described as flat may, typically, have rough and/ornonlinear features. Moreover, sharp angles that are illustrated may berounded. Thus, the regions illustrated in the figures may be schematicin nature and their shapes are not intended to limit the precise shapeof a region and are not intended to limit the scope of the presentclaims.

Herein, some exemplary embodiments of the present invention will bedescribed with reference to the attached drawings.

FIG. 1 is a perspective view of an apparatus for manufacturing a displaydevice according to an exemplary embodiment of the present disclosure.FIG. 2 is a side view of the apparatus according to the exemplaryembodiment of FIG. 1 .

Referring to FIGS. 1 and 2 , the apparatus may include a pickup assembly1000. The pickup assembly 1000 includes a pressing pad PP, whichincludes a body portion 85 and a vision hole VH that penetrates the bodyportion 85, a vision camera 100, which is disposed above the vision holeVH, and suction pickers 201 and 202, which are disposed on a side of thepressing pad PP.

The apparatus may further include a stage ST and a base 300, which facesthe stage ST. The stage ST and the base 300 will be described below.

The stage ST may provide a space for receiving a mother substrate MSincluding a plurality of unit substrates US. That is, the mothersubstrate MS, which is divided into the unit substrates US, may bedisposed on the stage ST.

In an exemplary embodiment, the stage ST may include a seating portion(not illustrated) for stably receiving the mother substrate MS.

In another exemplary embodiment, the stage ST may include a fasteningmeans for fastening the mother substrate MS. The fastening means mayfasten the mother substrate by, for example, directly contacting themother substrate MS or using a vacuum suction method.

The mother substrate MS may include the unit substrates US. The unitsubstrates US may be obtained by cutting the mother substrate MS intocell units in a cutting step S1 that will be described later withreference to FIG. 7 .

Each of the unit substrates US may form a single cell.

FIG. 3 is a cross-sectional view of a target object of the apparatusaccording to the exemplary embodiment of FIG. 1 .

Referring to FIG. 3 , in an embodiment, a unit substrate US may includea base substrate BS, a first protective film PF1, which is disposed onthe base substrate BS, and a second protective film PF2, which isdisposed below the base substrate BS. In an embodiment, the first andsecond protective films PF1 and PF2 may be removed in a peeling step S3that will be described later.

In an exemplary embodiment, the base substrate BS may be a substratethat is applicable to an organic light-emitting display device. In thisexemplary embodiment, first and second electrodes (not illustrated)facing each other and an organic light-emitting layer (not illustrated)disposed between the first and second electrodes may be formed on thebase substrate BS.

In another exemplary embodiment, the base substrate BS may be asubstrate that is applicable to a liquid crystal display (LCD) device.In this exemplary embodiment, the base substrate BS may include a pairof opposing substrates (not illustrated) facing each other and a liquidcrystal layer (not illustrated) disposed between the opposingsubstrates.

In an exemplary embodiment, the base substrate BS may comprise polyimide(PI). However, embodiments of the present disclosure are not limitedthereto.

Referring again to FIG. 1 , at least one alignment mark A may be formedon each of the unit substrates US. The alignment mark A may berecognized by the vision camera 100 that will be described later.

In an exemplary embodiment, the alignment mark A may be formed at acorner of each of the unit substrates US. FIG. 1 illustrates an examplein which one alignment mark A is formed at a corner of each of the unitsubstrates US, but the locations and the number of alignment marks Aformed are not particularly limited.

In another exemplary embodiment, a plurality of alignment marks A may beformed at various locations on each of the unit substrates US.

The base 300 may be disposed to be spaced apart from the stage ST and toface the stage ST. The base 300 may support the pressing pad PP, thevision camera 100, and the suction pickers 201 and 202. In anembodiment, the pressing pad PP, the vision camera 100, and the suctionpickers 201 and 202 may be coupled to, or formed in one integral bodywith, the base 300.

In an exemplary embodiment, the pressing pad PP may be disposed belowthe base 300. In an exemplary embodiment, the pressing pad PP mayinclude the body portion 85, a pressing portion 86, and the vision holeVH.

In an exemplary embodiment, the body portion 85 may be a distance (e.g.,a predetermined distance) apart from the base 300. In an exemplaryembodiment, the body portion 85 may be formed of a rigid material. Forexample, the body portion 85 may be formed of a metal or a plastic, butthe present disclosure is not limited thereto. That is, the material ofthe body portion 85 is not particularly limited.

The pressing portion 86 may be disposed below the body portion 85. Thepressing portion 86 may overlap with the body portion 85. In anexemplary embodiment, the pressing portion 86 may have a same planarshape as the body portion 85. In an exemplary embodiment, the pressingportion 86 may completely overlap with the body portion 85.

In an exemplary embodiment, the body portion 85 may have a shape of aframe having a hollow portion in a plan view. Accordingly, the pressingportion 86 may also be in the shape of a frame having a hollow portionand having a same size as the body portion 85 in a plan view.

In another exemplary embodiment, the body portion 85 may have a shape ofa closed curve (for example, a ring) having a hollow portion in a planview.

In this exemplary embodiment, the pressing portion 86 may also be in theshape of a closed curve having a hollow portion and having a same sizeas the body portion 85.

The pressing portion 86 may be placed in direct contact with each of theunit substrates US. Accordingly, the pressing portion 86 may be formedof a material with elasticity. For example, the pressing portion 86 maybe formed of rubber or a synthetic resin. In an exemplary embodiment,the pressing portion 86 may have a soft structure like that of sponge.

The pressing portion 86 may be placed in direct contact with each of theunit substrates US, and if the pressing portion 86 is rigid, thepressing portion 86 may cause damage to the unit substrates US. On theother hand, if the pressing portion 86 is formed of an elastic materialor has a structure like that of sponge, the unit substrates US may beprevented or substantially prevented from being damaged.

The vision hole VH may be formed to penetrate both the body portion 85and the pressing portion 86. Accordingly, the body portion 85 and thepressing portion 86 may both have a hollow portion in a plan view, asdescribed above. In an exemplary embodiment, the vision hole VH may beopen in a z-axis direction. Thus, when the vision hole VH is viewed inthe z-axis direction (e.g., a direction from the top to the bottom ofthe vision hole VH of FIG. 1 ), the alignment mark A of each of the unitsubstrates US may be viewed through the vision hole VH from below thevision hole VH in the z-axis direction.

The vision camera 100 may be disposed above the vision hole VH. Thevision camera 100 and the vision hole VH may be aligned in the z-axisdirection. In other words, the center of the vision camera 100 and thecenter of the vision hole VH may be aligned with each other in thez-axis direction.

The vision camera 100 may recognize the alignment mark A formed on eachof the unit substrates US through the vision hole VH.

In an exemplary embodiment, the vision camera 100 may be acharge-coupled device (CCD) camera, but the present disclosure is notlimited thereto. The vision camera 100 may be understood as encompassingnearly all means capable of recognizing an image or a particularpattern.

The vision camera 100 may be connected to the base 300. In anembodiment, the vision camera 100 may be formed to extend from the base300 in the z-axis direction.

In an embodiment, a connecting portion 74 may be disposed between thevision camera 100 and the pressing pad PP. That is, the connectingportion 74 may connect the vision camera 100 and the pressing pad PP andmay thus fasten the vision camera 100 and the pressing pad PP together.

In an embodiment, the camera 100 and the pressing pad PP, connected bythe connecting portion 74, may operate as one integral body. Forexample, as the vision camera 100 moves in a horizontal direction by adistance (e.g., a predetermined distance), the pressing pad PP,connected to the vision camera 100, may also move in the horizontaldirection along with the vision camera 100.

The movement of the vision camera 100 and the pressing pad PP will bedescribed later in further detail.

FIG. 4 is a partial plan view of the apparatus according to theexemplary embodiment of FIG. 1 . Referring to FIG. 4 , a vision area VAof the vision camera 100 and a penetration area HA of the vision hole VHmay at least partially overlap with each other.

The vision area VA of the vision camera 100 may be a maximum area thatcan be captured from one plane by the vision camera 100. The penetrationarea HA of the vision hole VH may be the area of a cross-section of thevision hole VH, taken along an x-y plane.

As described above, the center of the vision camera 100 and the centerof the vision hole VH may be aligned with each other in the z-axisdirection. In other words, the center of the vision camera 100 and thecenter of the vision hole VH may be disposed on a same straight lineparallel to a z axis.

In this case, the center of the vision area VA and the center of thepenetration area HA may be aligned with each other in the z-axisdirection. That is, the center of the vision area VA and the center ofthe penetration area HA may be disposed on a same line extendingparallel to the z-axis direction.

In an exemplary embodiment, the size of the vision area VA and the sizeof the penetration area HA may be substantially the same.

In another exemplary embodiment, the value obtained by dividing the areaof the penetration area HA by the area of the vision area VA may be 0.8or greater. If the value obtained by dividing the area of thepenetration area HA by the area of the vision area VA is less than 0.8,there may be a difficulty in recognizing the alignment mark A of each ofthe unit substrates US through the vision hole VH. On the other hand, ifthe value obtained by dividing the area of the penetration area HA bythe area of the vision area VA is 0.8 or greater, the vision camera 100can precisely recognize the alignment mark A of each of the unitsubstrates US through the vision hole VH.

Referring again to FIG. 1 , at least one suction picker may be disposedon one side of the pressing pad PP. FIG. 1 illustrates an example inwhich the first and second suction pickers 201 and 202 are disposed nearthe pressing pad PP.

FIG. 1 illustrates an example in which two suction pickers are provided,but the number of suction pickers is not particularly limited. That is,one suction picker or three or more suction pickers may be provided.

The second suction picker 202 may be substantially the same as the firstsuction picker 201. The first suction picker 201 will herein bedescribed. The following description of the first suction picker 201 maybe directly applicable to the second suction picker 202 or other suctionpickers that may also be provided.

In an exemplary embodiment, the first suction picker 201 may include asupporting bar 65 and a suction pad 64.

The supporting bar 65 may extend from the base 300 and may support thesuction pad 64. The suction pad 64 may be disposed at one end of thesupporting bar 65. The suction pad 64 may be placed in contact with eachof the unit substrates US and may thus lift up each of the unitsubstrates US.

In an exemplary embodiment, the suction pad 64 may fix each of the unitsubstrates US in a vacuum suction manner. In this exemplary embodiment,the supporting bar 65, which is connected to the suction pad 64, mayinclude a vacuum path provided for the suction pad 64 to create avacuum.

The relationship between the pressing pad PP and the first and secondsuction pickers 201 and 202 will herein be described with reference toFIG. 2 .

Referring to FIG. 2 , in an exemplary embodiment, a bottom of thepressing pad PP (particularly, the bottom of the pressing portion 86)and a bottom of the suction pad 64 may be disposed on an imaginary firstplane P1.

In this exemplary embodiment, in response to the base 300 being moveddownward in the z-axis direction, the bottom of the pressing pad PP andthe bottom of the suction pad 64 may be concurrently (e.g.,simultaneously) placed in contact with a unit substrate US.

For convenience, some terms will herein be defined first. A height froma top surface of the stage ST to the vision camera 100 will herein bereferred to as a first height h1; a height from the top surface of thestage ST to the bottom of the pressing pad PP will herein be referred toas a second height h2; and a height from the top surface of the stage STto the bottom of the suction pad 64 will herein be referred to as athird height h3.

In the case in which the bottom of the pressing pad PP and the bottom ofthe suction pad 64 are disposed on the same plane, as mentioned above,the second and third heights h2 and h3 may be substantially the same.

In an exemplary embodiment, the value obtained by dividing the secondheight h2 by the first height h1 may be 0.4 to 0.5. In this exemplaryembodiment, the vision camera 100 can precisely recognize an alignmentmark A formed on the unit substrate US through the vision hole VH.

The operation of the apparatus for manufacturing a display deviceaccording to an exemplary embodiment of the present disclosure willherein be described with reference to FIGS. 1, 2, and 5 .

FIG. 5 is a side view of the apparatus for manufacturing a displaydevice according to an exemplary embodiment of the present disclosure.

Referring to FIG. 5 , in an exemplary embodiment, the base 300 may beconnected to a driving rod 400. The driving rod 400 may provide adriving force to the base 300. For example, the driving rod 400 may movethe base 300 linearly in any direction selected from among an x-axisdirection, a y-axis direction, and the z-axis direction.

The driving rod 400 may rotate the base 300 about any one of a firstrotational axis, which is parallel to an x axis, a second rotationalaxis, which is parallel to a y axis, and a third rotational axis, whichis parallel to the z axis.

In an exemplary embodiment, the vision camera 100, the first suctionpicker 201, the second suction picker 202, and the pressing pad PP,which are all coupled to the base 300, may be concurrently (e.g.,simultaneously) movable as one integral body, but the present disclosureis not limited thereto. In another exemplary embodiment, the visioncamera 100, the first suction picker 201, the second suction picker 202,and the pressing pad PP may be movable independently of one another.

In an exemplary embodiment, the pickup assembly 1000 may receive thedriving force provided by the driving rod 400 and may thus move over thex-y plane. The pickup assembly 1000 may move to an input location (e.g.,a predetermined input location) on the x-y plane or to a location forlifting up a particular unit substrate US.

Referring to FIG. 2 , a curl may be formed at a corner portion of theunit substrate US. The unit substrate US may be very thin, and a curlmay be formed at an end of the unit substrate US due to, for example,static electricity. If a curl is formed in the unit substrate US, thealignment mark A formed at a corner portion of the unit substrate US maynot be able to be precisely recognized, even if the vision camera 100 ismoved down.

Referring to FIG. 5 , the pickup assembly 1000, disposed above a unitsubstrate US, may be moved down in the z-axis direction. As the pickupassembly 1000 is moved down in the z-axis direction, the pressingportion 86 and the suction pad 64 may be concurrently (e.g.,simultaneously) placed in contact with the unit substrate US. Then, thepressing portion 86 presses a curled portion of the unit substrate US,and, as a result, the unit substrate US may be flattened. In this case,an alignment mark A formed on the unit substrate US may overlap with thepressing pad PP, particularly, the vision hole VH. Accordingly, thevision camera 100 may be able to recognize the alignment mark A throughthe vision hole VH. In a case in which the vision camera 100 does notrecognize the alignment mark A, the pickup assembly 1000 needs to belifted up and then moved down again. Once the vision camera 100 becomesable to recognize the alignment mark A through the vision hole VH whilethe curled portion of the unit substrate US is being pressed with thepressing portion 86, any loss in processing time that may be caused byrecognition failure can be reduced or minimized.

Once the vision camera 100 recognizes the alignment mark A, the suctionpad 64 may drive a vacuum and may thus adhere to the unit substrate US.Accordingly, the unit substrate US may be fixed to the pickup assembly1000, and the pickup assembly 1000 may be able to move the unitsubstrate US fixed thereto to another place (e.g. a predetermined place)for subsequent processing.

An apparatus for manufacturing a display device according to anotherexemplary embodiment of the present disclosure will herein be described.In FIGS. 4 and 6 , like reference numerals indicate like elements, and,thus, descriptions thereof will be omitted or simplified.

FIG. 6 is a partial plan view of an apparatus for manufacturing adisplay device according to another exemplary embodiment of the presentdisclosure.

Referring to FIG. 6 , the apparatus of FIG. 6 differs from the apparatusof FIG. 4 in that a planar shape of a vision hole VH1 is circular. In anexemplary embodiment, the planar shape of the vision hole VH1 may becircular. In this exemplary embodiment, a body portion 87 may have ashape of a ring having a hollow portion.

In the case in which the planar shape of the vision hole VH1 iscircular, the planar shape of a vision area VA of a vision camera 100may also be circular.

In an exemplary embodiment, the center of the vision area VA of thevision camera 100 and the center of a penetration area HA of the visionhole VH1 may be aligned in a z-axis direction. In other words, thecenter of the vision area VA of the vision camera 100 and the center ofthe penetration area HA of the vision hole VH1 may be disposed on a sameline parallel to the z axis.

In an exemplary embodiment, the value obtained by dividing the area ofthe penetration area HA of the vision hole VH1 by the area of the visionarea VA of the vision camera 100 may be 0.8 or greater.

As described above, if the value obtained by dividing the area of thepenetration area HA of the vision hole VH1 by the area of the visionarea VA of the vision camera 100 is 0.8 or greater, the vision camera100 can precisely recognize an alignment mark A formed on each unitsubstrate US through the vision hole VH1.

A method of manufacturing a display device according to some exemplaryembodiments of the present disclosure will herein be described. In FIGS.1 through 10 , like reference numerals indicate like elements, and,thus, detailed descriptions thereof will be omitted.

FIG. 7 is a block diagram illustrating a method of manufacturing adisplay device according to an exemplary embodiment of the presentdisclosure.

Referring to FIG. 7 , the method may include a cutting step (S1), apickup step (S2), a peeling step (S3), and an inspection step (S4).

FIGS. 8 and 9 are plan views illustrating a cutting step of the methodaccording to the exemplary embodiment of FIG. 7 .

Referring to FIGS. 8 and 9 , the cutting step S1 may include preparing amother substrate MS on a stage ST.

The mother substrate MS may be a substrate providing materials formanufacturing a plurality of display devices.

In an exemplary embodiment, a plurality of alignment marks A may bedisposed on the mother substrate MS. In an exemplary embodiment, each ofthe alignment marks A may correspond to a single unit substrate US.

FIG. 8 illustrates an example in which the alignment marks A are formedon the mother substrate MS before the cutting step S1, but the presentdisclosure is not limited thereto. In another example, the alignmentmarks A may be formed after the cutting step S1.

Thereafter, referring to FIG. 9 , the cutting step S1 may furtherinclude separating the mother substrate MS into a plurality of unitsubstrates US.

In an exemplary embodiment, a plurality of horizontal cutting lines anda plurality of vertical cutting lines may be formed on the mothersubstrate MS.

In an exemplary embodiment, the horizontal cutting lines and thevertical cutting lines may be formed by using a laser, but the presentdisclosure is not limited thereto. In another exemplary embodiment, thehorizontal cutting lines and the vertical cutting lines may be formed ina direct contact manner.

Once the horizontal cutting lines and the vertical cutting lines areformed, as illustrated in FIG. 9 , the mother substrate MS may beseparated into a plurality of unit substrates US. The unit substrates USin their cut state may be placed in contact with their respectiveneighboring unit substrates US.

FIG. 10 is a plan view illustrating the pickup step S2 of the methodaccording to the exemplary embodiment of FIG. 7 . Referring to FIG. 10 ,at least one pickup assembly may be disposed over the stage ST. FIG. 10illustrates an example in which first and second pickup assemblies 1001and 1002 are disposed over the stage ST. In an embodiment, the first andsecond pickup assemblies 1001 and 1002 may be substantially the same asthe pickup assembly 1000 according to the exemplary embodiment of FIG. 1.

FIG. 10 illustrates an example in which two pickup assemblies aredisposed over the stage ST, but the number of pickup assemblies is notparticularly limited. In other examples, one pickup assembly or three ormore pickup assemblies may be provided.

In an embodiment, the first and second pickup assemblies 1001 and 1002may lift up each of the unit substrates US in the same manner asdescribed above with reference to FIGS. 1, 2, and 5 .

The first and second pickup assemblies 1001 and 1002 may lift up andmove each of the unit substrates US for subsequent processing. Once eachof the unit substrates US is transferred by the first and second pickupassemblies 1001 and 1002, the corresponding unit substrate US may besubjected to the peeling step S3.

In the peeling step S3, first and second protective films PF1 and PF2may be peeled off from the top and the bottom, respectively, of each ofthe unit substrates US. Thereafter, the inspection step S4 may beperformed. The inspection step S4 may include an exterior inspection andmay determine whether the first and second protective films PF1 and PF2have been completely removed from each of the unit substrates US in thepeeling step S3.

However, effects of the present invention are not restricted to that setforth herein. The above and other effects of the present invention willbecome more apparent to one of ordinary skill in the art to which thepresent invention pertains by referencing the claims.

While the present invention has been particularly illustrated anddescribed with reference to some exemplary embodiments thereof, it willbe understood by those of ordinary skill in the art that various changesin form and detail may be made therein without departing from the spiritand scope of the present invention as set forth by the following claims.The exemplary embodiments should be considered in a descriptive senseand not for purposes of limitation.

What is claimed is:
 1. An apparatus for manufacturing a display device,the apparatus comprising: a pressing pad including a body portion andhaving a vision hole penetrating the body portion; a vision camera abovea top surface of the pressing pad and overlapping the vision hole; and asuction picker comprising a suction pad configured to fix a first unitsubstrate in a vacuum suction manner in response to at least onealignment mark on the first unit substrate being recognized by thevision camera, the suction picker being separated from, and spaced in alateral direction from, the body portion, wherein the pressing pad isplaced in contact with the first unit substrate to flatten the firstunit substrate.
 2. The apparatus of claim 1, wherein the pressing padfurther includes a pressing portion below the body portion, and thevision hole penetrates the body portion and the pressing portion.
 3. Theapparatus of claim 2, wherein the pressing portion is formed of anelastic material.
 4. The apparatus of claim 1, wherein the body portionhas a shape of a frame surrounding the vision hole in a plan view. 5.The apparatus of claim 1, wherein the body portion is ring-shaped in aplan view.
 6. The apparatus of claim 1, further comprising a stage tosupport a plurality of unit substrates including the first unitsubstrate.
 7. The apparatus of claim 6, wherein the at least onealignment mark is formed on each of the unit substrates, and the visioncamera is configured to recognize the at least one alignment markthrough the vision hole.
 8. The apparatus of claim 6, wherein thepressing pad is movable downward in a z-axis direction to press each ofthe unit substrates.
 9. The apparatus of claim 8, wherein the pressingpad and the suction picker are movable downward in the z-axis directionto be concurrently placed in contact with the first unit substrate. 10.The apparatus of claim 6, wherein a distance from a top surface of thestage to the vision camera is defined as a first height, a distance fromthe top surface of the stage to the pressing pad is defined as a secondheight, and a value obtained by dividing the second height by the firstheight is 0.4 to 0.5.
 11. The apparatus of claim 1, wherein the visioncamera and the vision hole are aligned in a z-axis direction.
 12. Theapparatus of claim 1, further comprising a connecting portion connectingthe pressing pad and the vision camera.
 13. The apparatus of claim 1,wherein a bottom of the pressing pad and a bottom of the fixing portionsuction pad are on a same plane.
 14. The apparatus of claim 1, wherein aplanar area recognized by the vision camera is defined as a vision area,a planar area occupied by the vision hole is defined as a penetrationarea, and a value obtained by dividing the area of the penetration areaby the area of the vision area is 0.8 or greater.
 15. The apparatus ofclaim 14, wherein a center of the vision area and a center of thepenetration area are on a same line parallel to a z-axis direction. 16.The apparatus of claim 1, wherein the vision camera, the pressing pad,and the suction picker are connected to one another and are movable asone integral body.
 17. The apparatus of claim 1, wherein the suctionpicker is configured to move independently of the pressing pad.